Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique (Q35801415)
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scientific article published on 9 February 2012
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English | Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique |
scientific article published on 9 February 2012 |
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Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique (English)
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Qing Zhou
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Fei Xie
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Jianming Sang
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Haixia Alice Zhang
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Wengang Wu
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Zhihong Li
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