Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique (Q35801415)

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scientific article published on 9 February 2012
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Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique
scientific article published on 9 February 2012

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    Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique (English)
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    Qing Zhou
    Fei Xie
    Jianming Sang
    Haixia Alice Zhang
    Wengang Wu
    Zhihong Li
    9 February 2012
    16502-165028

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