Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding. (Q51396953)

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scientific article published on 30 June 2005
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Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding.
scientific article published on 30 June 2005

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    Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding. (English)
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