Sub-10-nm nanochannels by self-sealing and self-limiting atomic layer deposition (Q84672215)
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scientific article published on 01 September 2010
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Sub-10-nm nanochannels by self-sealing and self-limiting atomic layer deposition |
scientific article published on 01 September 2010 |
Statements
Sub-10-nm nanochannels by self-sealing and self-limiting atomic layer deposition (English)
Sung-Wook Nam
Min-Hyun Lee
Seung-Hyun Lee
Do-Joong Lee
S M Rossnagel
1 September 2010