Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor (Q79947010)
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scientific article published on 23 November 2007
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor |
scientific article published on 23 November 2007 |
Statements
Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor (English)
Ying-Bing Jiang
George Xomeritakis
Zhu Chen
Darren Dunphy
David J Kissel
Joseph L Cecchi
C Jeffrey Brinker
23 November 2007