Collapse of microchannels during anodic bonding: Theory and experiments (Q58745617)
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article published in 2004
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Collapse of microchannels during anodic bonding: Theory and experiments |
article published in 2004 |
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Collapse of microchannels during anodic bonding: Theory and experiments (English)
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March 2004
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95
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5
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2800-2808
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1 reference