High fidelity, high yield production of microfluidic devices by hot embossing lithography: rheology and stiction. (Q51585126)
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scientific article published on 16 May 2006
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English | High fidelity, high yield production of microfluidic devices by hot embossing lithography: rheology and stiction. |
scientific article published on 16 May 2006 |
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High fidelity, high yield production of microfluidic devices by hot embossing lithography: rheology and stiction. (English)
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Neil S Cameron
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Helene Roberge
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Teodor Veres
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Stephen C Jakeway
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H John Crabtree
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16 May 2006
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6
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7
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936-941
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