Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. (Q51574592)
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scientific article published in November 2004
Language | Label | Description | Also known as |
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English | Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. |
scientific article published in November 2004 |
Statements
Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. (English)
1 reference
Jun Zhang
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Samuel R Conner
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1 November 2004
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4
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6
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646-653
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