A rapid and economical method for profiling feature heights during microfabrication. (Q51551799)
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scientific article published on 13 January 2011
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A rapid and economical method for profiling feature heights during microfabrication. |
scientific article published on 13 January 2011 |
Statements
A rapid and economical method for profiling feature heights during microfabrication. (English)
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Gloria S Yen
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Bryant S Fujimoto
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Thomas Schneider
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Desmond T K Huynh
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Daniel T Chiu
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13 January 2011
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11
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5
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974-977
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