Ordered arrays of <100>-oriented silicon nanorods by CMOS-compatible block copolymer lithography. (Q50994950)
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scientific article published on 26 May 2007
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Ordered arrays of <100>-oriented silicon nanorods by CMOS-compatible block copolymer lithography. |
scientific article published on 26 May 2007 |
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Ordered arrays of <100>-oriented silicon nanorods by CMOS-compatible block copolymer lithography. (English)
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Thomas P Russell
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Craig J Hawker
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Danilo Zschech
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Alexey P Milenin
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Roland Scholz
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Reinald Hillebrand
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Ulrich Gösele
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26 May 2007
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7
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1516-1520
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6
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