deep reactive-ion etching (Q486936)

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highly anisotropic etch process
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Language Label Description Also known as
English
deep reactive-ion etching
highly anisotropic etch process

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    BoschProcess JH.jpg
    595 × 720; 37 KB
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    Bosch process PILLAR.jpg
    712 × 484; 219 KB
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    Bosch process sidewall.jpg
    712 × 484; 203 KB
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