A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions (Q48132499)
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scientific article published on 30 January 2018
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions |
scientific article published on 30 January 2018 |
Statements
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions (English)
1 reference
Yuki Shimizu
Satoshi Kataoka
30 January 2018
1 reference
30 January 2018
1 reference
Identifiers
1 reference
28 January 2021