Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices (Q47150375)

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scientific article published in January 2018
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Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
scientific article published in January 2018

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    Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices (English)
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    Jae Woong Yoon
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    Seong-Min Ma
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    Gun Pyo Kim
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    Yoonshik Kang
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    Joonseong Hahn
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    Oh-Jang Kwon
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    Kyuyoung Kim
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    Seok Ho Song
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    January 2018
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    1
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    1
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    60-67
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