Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond (Q39042973)
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scientific article published on March 2015
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond |
scientific article published on March 2015 |
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Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond (English)
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N Mojarad
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M Hojeij
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L Wang
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J Gobrecht
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Y Ekinci
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1 March 2015
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7
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4031-4037
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