Single-chip mechatronic microsystem for surface imaging and force response studies (Q37704802)

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Single-chip mechatronic microsystem for surface imaging and force response studies
scholarly article

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    Single-chip mechatronic microsystem for surface imaging and force response studies (English)
    Sadik Hafizovic
    Diego Barrettino
    Tormod Volden
    Jan Sedivy
    Kay-Uwe Kirstein
    Oliver Brand
    Andreas Hierlemann
    29 November 2004
    101
    49
    17011-17015

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