Capacitive micromachined ultrasonic transducers: fabrication technology. (Q36389498)
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English | Capacitive micromachined ultrasonic transducers: fabrication technology. |
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Capacitive micromachined ultrasonic transducers: fabrication technology (English)
Arif Sanli Ergun
Yongli Huang
Xuefeng Zhuang
Goksen G Yaralioglu
Butrus T Khuri-Yakub
1 December 2005