Photolithographic surface micromachining of polydimethylsiloxane (PDMS). (Q33994739)
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English | Photolithographic surface micromachining of polydimethylsiloxane (PDMS). |
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Photolithographic surface micromachining of polydimethylsiloxane (PDMS). (English)
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Weiqiang Chen
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Raymond H W Lam
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Jianping Fu
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17 November 2011
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12
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391-395
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