Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field (Q28272867)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field |
scientific article |
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Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field (English)
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November 2006
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6
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11
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2438-41
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