Ion beam lithography (Q1672059)
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lithographic technique that uses a scanning ion beam
Language | Label | Description | Also known as |
---|---|---|---|
English | Ion beam lithography |
lithographic technique that uses a scanning ion beam |
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1 reference
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Wikipedia(4 entries)
- dewiki Ionenstrahllithografie
- enwiki Ion beam lithography
- fawiki طرحنگار یونی
- ruwiki Ионно-лучевая литография