metalorganic vapour phase epitaxy (Q1924991)

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method of producing thin films (polycrystalline and single crystal)
  • OMVPE
  • metalorganic chemical vapour deposition
  • MOCVD
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English
metalorganic vapour phase epitaxy
method of producing thin films (polycrystalline and single crystal)
  • OMVPE
  • metalorganic chemical vapour deposition
  • MOCVD

Statements

Metalorganic vapour-phase epitaxy
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Identifiers