Towards quantitative electrostatic potential mapping of working semiconductor devices using off-axis electron holography. (Q53162985)

12 May 2018

title

Towards quantitative electrostatic potential mapping of working semiconductor devices using off-axis electron holography. (English)

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12 May 2018

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3

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Rafal E. Dunin-Borkowski

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Takeshi Kasama

object named as

Takeshi Kasama

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author name string

Sadegh Yazdi

1

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12 May 2018

Maryam Samaie Yekta

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David W McComb

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Alison C Twitchett-Harrison

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publication date

31 December 2014

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12 May 2018

published in

Ultramicroscopy

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12 May 2018

volume

152

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12 May 2018

page(s)

10-20

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12 May 2018

Enhancing semiconductor device performance using ordered dopant arrays.

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Identifiers

DOI

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12 May 2018

PubMed ID

25576656

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12 May 2018