The use of combinatorial chemical vapor deposition in the synthesis of Ti(3-delta)O4N with 0.06 < delta < 0.25: a titanium oxynitride phase isostructural to anosovite (Q33438604)

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The use of combinatorial chemical vapor deposition in the synthesis of Ti(3-delta)O4N with 0.06 < delta < 0.25: a titanium oxynitride phase isostructural to anosovite
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    The use of combinatorial chemical vapor deposition in the synthesis of Ti(3-delta)O4N with 0.06 < delta < 0.25: a titanium oxynitride phase isostructural to anosovite (English)
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    21 November 2007
    15541-15548

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