Jump to content

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena (Q29043658)

From Wikidata
journal
  • Journal of vacuum science & technology. B, Microelectronics processing and phenomena
edit
Language Label Description Also known as
default for all languages
No label defined
    English
    Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena
    journal
    • Journal of vacuum science & technology. B, Microelectronics processing and phenomena

    Statements

    title
    Journal of vacuum science & technology. B, Microelectronics processing and phenomena (English)
    1 reference
    stated in
    ISSN Portal
    ISSN
    0734-211X

    Identifiers

    ISSN
    0734-211X
    subject named as
    Journal of vacuum science & technology. B, Microelectronics processing and phenomena
    distribution format
    printed matter
    0 references
    2327-9877
    subject named as
    Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
    distribution format
    online publication
    1 reference
    retrieved
    23 March 2018
    reference URL
    https://api.crossref.org/journals/2327-9877
    ISSN-L
    0734-211X
    0 references
    Crossref journal ID
    5527
    0 references
    HAL journal ID
    16452
    0 references
    OpenAlex ID
    S4210191927
    0 references
    Scilit journal ID
    1393127
    0 references
    Scopus source ID
    32160
    0 references
     
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit
                    edit
                      Retrieved from "https://www.wikidata.org/w/index.php?title=Q29043658&oldid=2331084027"