Yan Borodovsky (Q20201260)
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microlithography researcher
- Yan A. Borodovsky
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Yan Borodovsky |
microlithography researcher |
|
Statements
2012
For contributions to developing and implementing innovative lithographic and patterning equipment and processes to enable cost-effective scaling for logic technologies. (English)